超声键合装置中劈刀的稳态振型研究  

STUDY ON STEADY-STATE MODAL SHAPES OF A BONDING TOOL IN ULTRASONIC BONDING

作　　者：程宝[1] 韩雷[1] 

机构地区：[1]中南大学机电学院,长沙410083

出　　处：《振动与冲击》2008年第2期150-153,共4页Journal of Vibration and Shock

基　　金：国家自然科学基金项目(50575230);国家重点基础研究发展计划资助项目(2003CB716202)

摘　　要：利用扫描式多普勒测振仪,对劈刀的振动形态进行测试,其结果证实了:当改变劈刀与变幅杆联结的松紧程度时,会对其振动的模态振型产生影响;外部输入功率也会随着连接松紧度的改变而发生变化。对劈刀振动的模态振型作进一步的实验研究,将对优化设计超声振动系统、提高超声能量的利用率有重要意义。Vibration modal shapes of a bonding tool with high frequency velocity are measured with a laser Doppler vibrometer,then the theoretic conclusion is proven.When the tighting level between the bonding tool and the horn is changed,it produces strong influence on the vibration modes of the bonding tool,meantime the instantaneous input power also changes.The further studying on the vibration modal shapes of a bonding tool is very important to optimal design of ultrasonic vibration systems and improvement of the energy transmission efficiency.

关 键 词：超声键合 激光多普勒测振仪 扫描 振型 

分 类 号：TB559[理学—物理] TH825[理学—声学]