超声键合装置中劈刀稳态振动的试验建模  

Experimental modeling on steady-state vibration of bonding tool in ultrasonic bonding

作　　者：程宝[1] 韩雷[1] 

机构地区：[1]中南大学机电工程学院,长沙410083

出　　处：《焊接学报》2008年第2期40-44,共5页Transactions of The China Welding Institution

基　　金：国家自然科学基金资助重大项目(50575230);国家重点基础研究发展计划资助项目(2003CB716202)

摘　　要：利用PSV-400-M2(1.5MHz)高频型扫描式激光多普勒测振仪,对超声键合装置中受正弦激励、超声加载作用下的键合工具(劈刀),在不同松紧度下的稳态振动进行了连续扫描测试。结果表明,当劈刀连接的松紧度发生改变时,其稳态振动表现出不确定性;同一松紧度下振动形态中出现单节点,但不同松紧度下节点出现的位置不同;劈刀末端的速度振幅并不是人们期望的那样是最大。此外,基于弹性梁振动的基本理论对劈刀的稳态振动进行了探讨,得到其振动的近似模型。The sinusoidally excited vibration of bonding tool at measurement for a ultrasonic load was measured by continuously scanning laser Doppler vibrometer PSV-400-M2(1.5 MHz).The experimental phenomena and scanning testing results showed the steady-state vibration show uncertainty when the tightness changes;under the same tightness there is single-node in vibration,but under different tightness the node positions have changed;the velocity amplitude is not as the largest as expection.In addition,the mathematics modeling was carried out based on the vibration theory of flexible beam.

关 键 词：超声键合 激光多普勒测振仪 扫描 松紧度 

分 类 号：TB559[理学—物理]