A Novel Capacitive Biaxial Microaccelerometer Based on the Slide-Film Damping Effect  

一种新型的基于滑膜阻尼的电容式双向MEMS惯性传感器(英文)

作　　者：董林玺[1] 颜海霞 钱忺[1] 孙玲玲[1] 

机构地区：[1]杭州电子科技大学微电子CAD研究所,杭州310018 [2]东芝水电设备有限公司,杭州311504

出　　处：《Journal of Semiconductors》2008年第2期219-223,共5页半导体学报（英文版）

基　　金：国家自然科学基金资助项目(批准号:60506015)~~

摘　　要：A novel capacitive biaxial microaccelerometer with a highly symmetrical microstructure is developed. The sensor is composed of a single seismic mass, grid strip, supporting beam, joint beam, and damping adjusting combs. The sensing method of changing capacitance area is used in the design,which depresses the requirement of the DRIE process, and de- creases electronic noise by increasing sensing voltage to improve the resolution. The parameters and characteristics of the biaxial microaccelerometer are discussed with the FEM tool ANSYS. The simulated results show that the transverse sensitivity of the sensor is equal to zero. The testing devices based on the slide-film damping effect are fabricated, and the testing quality factor is 514, which shows that the designed structure can improve the resolution and proves the feasibility of the designed process.设计了一个新型的结构完全对称的双向MEMS电容式惯性传感器.该传感器主要由可动质量块、栅形条、支撑梁、连接梁、阻尼调整梳齿组成.设计的结构采用变电容面积的检测方式,在降低空气阻尼的同时也降低了对DRIE工艺的要求,并通过加大测试信号电压来降低电路噪声,从而提高传感器的分辨率.用有限元工具ANSYS详细讨论了传感器的参数和性能,并模拟验证了设计的双向传感器的交叉效应近似为零.制作了滑膜阻尼测试器件,在大气压下,测得的品质因子可达514 ,验证了该结构设计可以提高传感器的分辨率和该工艺设计的可行性.

关 键 词：capacitive accelerometer inertial sensor high resolution MEMS 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]