微水导激光划片工艺原理及应用  

The Technology Principle and Application of Water-Jet-Guided Laser Scribing

作　　者：王宏智[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京东燕郊101601

出　　处：《电子工业专用设备》2008年第3期27-31,49,共6页Equipment for Electronic Products Manufacturing

摘　　要：从应用需求出发,介绍了微水导激光划片工艺的主要原理和特点;对其关键工艺机构中的光学聚焦系统、激光在水柱中的全反射传播、激光系统、压力水腔和喷嘴组成的光液耦合器等原理进行了简单分析和介绍;对微水导激光划片工艺的应用前景进行了总结和展望。The principal principle and special features of the water-jet-guided laser scribing technology is introduced by application in demand in this paper, and the primary principle of optical focusing system, the reflecting transmitting of laser light through water beam, the laser system, the photo-liquid coupling mechanism buildup by pressure water chamber and nozzle etc are analyzed simply and introduced. In the end, the application prospects of water-jet-guided laser scribing technology is summarized and presented.

关 键 词：微水导激光 光液耦合 划切 微水柱 热熔效应 超薄晶圆 Low—K介质层 LED衬底 

分 类 号：TN305.1[电子电信—物理电子学]