基于MEMS工艺的电磁驱动无阀微泵  

Valveless micropump using electromagnetic actuation based on MEMS technology

作　　者：张涛[1] 吴一辉[1] 张平[1] 刘永顺[1] 于震雷[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《功能材料与器件学报》2008年第1期98-102,共5页Journal of Functional Materials and Devices

基　　金：国家863资助项目(No.06593NQ070);吉林省科研基金资助项目(No.06443UQ060)

摘　　要：基于实现主动微流体芯片的目的,提出了一种非闭合磁路型电磁驱动无阀微泵。微型电磁驱动器采用硅深刻蚀和微电铸工艺制作在硅基体上,微泵泵体的收缩/扩张单元采用微机械工艺制作,采用两步注塑工艺加工磁性PDMS(polymethylsiloxane)振动膜。电磁微泵样机的实验结果显示:该微泵的工作性能稳定,整机具有较高的体积功能比,样机尺寸32mm×28mm×10mm,在0.6A电流输入,工作频率为13Hz时,流量可达180μl/min,零流量下的最大背压达2.75mbar。In order to obtain active microfluidic chips, we present a valveless micropump, which is magnetically actuated using an external electromagnet. The micro electromagnetic actuator without enclosed magnetic circuit is fabricated by DE - LIGA technologies on the silicon wafer, the body of micropump contains two nozzle/diffuser elements and a PDMS （polymethylsiloxane） membrane with embedded permanent magnet. Through a series of tests, the micropump possesses the stable work performance and owns higher ratio of performance to volume： the apparent dimension of pump is 32mm × 28mm× 10mm, with a sinusoidal current of 0.6A, the resonance frequency is 13 Hz, the micropump have been able to provide flow rates up to180μl/min and back pressure up to 2.75mbar.

关 键 词：微机械 微型电磁驱动器 微型泵 集成磁性薄膜 

分 类 号：TN406[电子电信—微电子学与固体电子学]