面向微泵的微型扩散/收缩管的优化设计  

Optimized design on micro-diffuser/nozzle facing micro pump

作　　者：黄杰西[1] 李修函[1] 于晓梅[1] 

机构地区：[1]北京大学微电子研究院微米/纳米加工技术国家重点实验室,北京100871

出　　处：《功能材料与器件学报》2008年第1期205-209,共5页Journal of Functional Materials and Devices

基　　金：63资助项目(No.2006AA04Z336)

摘　　要：微型扩散/收缩泵属于无阀型微机械往复微泵,其性能可以通过优化微型扩散/收缩管的结构参数得到优化。本文利用Fluent软件模拟得到最优的微型扩散/收缩管的结构参数,并提出微型固定鳞片式扩散/收缩管结构。基于硅基MEMS技术制备微型扩散/收缩泵,并通过Fluent软件模拟和实验验证了鳞片式扩散/收缩泵可以提高流阻效率11%。Micro valveless nozzle/diffuser pump is a diaphragm pump, which utilize the different pressure drop characteristics of flow through a diffuser and a nozzle to direct the flow in one preferential direction, and hence cause a net pumping direction. In order to increase the flow rate of the nozzle/diffuser pump, fin - shaped micronozzle/diffuser pump was developed in this work. Fluent was used to simulate the characteristics of fin -shaped micro- diffuser/nozzle pump, and optimized parameters were given. Measurement results show that the new design can improve the micronozzle/diffuser pumping performance of 11%.

关 键 词：微泵 扩散/收缩泵 扩散/收缩管 鳞片 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]