基于NURBS自由曲面插值的IC芯片数字图像放大方法研究  

Study on image enlarging technology for IC chip topography based on NURBS free surface interpolation

作　　者：梁忠伟[1] 叶邦彦[1] 彭锐涛[1] 徐兰英[1] 

机构地区：[1]华南理工大学机械工程学院,广州510460

出　　处：《电子测量技术》2008年第2期34-38,共5页Electronic Measurement Technology

摘　　要：本文在论述图像放大技术在计算机芯片检测中的重要性基础上,提出基于非均匀有理B样条(NURBS)自由曲面的数字图像插值放大方法,通过像素点位置坐标灰度值建立三维坐标系以及NURBS曲面,确定新插入点的像素灰度值从而获得放大图像。理论研究与实验结果表明,此方法能够获得稳定清晰的IC芯片表面特征放大数字图像,以便用于后续的图像研究处理工作。After discussing the importance of image enlarging technology in the course of IC chip＇s optical detecting, this paper investigates a new image enlarging technology based on NURBS free surface interpolation. It uses image pixels＇ coordinates and gray level to build up a NURBS surface,and then determines gray value of interpolated points. Experimental result shows that this technology can obtain a stable and clear enlarging image of IC chips; As a result, further process on the image is facilitated.

关 键 词：数字图像 NURBS自由曲面 图像插值放大 IC芯片 

分 类 号：TP751[自动化与计算机技术—检测技术与自动化装置]