飞秒激光玻璃微加工技术  

Micromachining in Glass with Femtosecond Laser

作　　者：彭志农[1] 贾威[1] 王清月[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《纳米技术与精密工程》2008年第2期114-117,共4页Nanotechnology and Precision Engineering

基　　金：教育部科学技术研究重大项目(10410);天津市科技发展计划资助项目(043103911);超精密加工技术国防科技重点实验室基金资助项目(51464010205JW14)

摘　　要：为了研究飞秒激光作用下光学玻璃内部发生的改性过程,利用重复频率为1 kHz、中心波长为775 nm、脉宽为130 fs的飞秒激光对光学玻璃进行微加工.结果表明,激光辐照区发生永久性折射率改变,并且玻璃的改性线宽随着激光功率的增加而增加,随激光扫描速度的降低而增加.根据飞秒激光致使光学玻璃发生改性的特点,利用飞秒激光在光学玻璃内部直接刻写了相位光栅和二维图案,研究了相位光栅的衍射特性.To investigate the femtosecond laser modification in optical glass, a commercial femtosecond laser system, which produced 130 fs pulses at a wavelength of 775 nm and a repetition rate of 1 kHz, was used in micromachining in glass. The results show that pennanent refractive-index change is induced by illumination with high-power laser, and the width of the modified line increases with the laser power increasing and the scanning velocity decreasing. And then a phase grating and 2D logo were fabricated in glass using a femtosecond laser to study its diffraction character experimentally.

关 键 词：飞秒激光 光学玻璃 微加工 

分 类 号：TQ171.6[化学工程—玻璃工业]