等离子体浸没离子注入与沉积合成TiN薄膜的滚动接触疲劳寿命和机械性能  

ROLLING CONTACT FATIGUE LIFE AND MECHANICAL PROPERTY OF TiN FILM FABRICATED BY PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION

作　　者：刘洪喜[1] 蒋业华[1] 周荣[1] 周荣锋[1] 金青林[1] 汤宝寅[2] 

机构地区：[1]昆明理工大学机电工程学院,昆明650093 [2]哈尔滨工业大学现代焊接生产技术国家重点实验室,哈尔滨150001

出　　处：《金属学报》2008年第3期325-330,共6页Acta Metallurgica Sinica

基　　金：教育部博士点基金20060674002~~

摘　　要：采用等离子体浸没离子注入与沉积(PIII&D)技术在AISI 52100轴承钢表面合成了高硬耐磨的TiN薄膜.膜层元素分布、化学组成和表面形貌分别用XRD,XPS表征.合成薄膜前后试样的滚动接触疲劳寿命和摩擦磨损性能分别由球棒疲劳磨损试验机和球-盘磨损试验机测定;疲劳破坏后的微观形貌通过SEM观察;薄膜力学性能经纳米压痕和纳米划痕实验评价.结果表明,TiN膜中还含有少量的TiO_2和Ti,N,O的化台物.在优化条件下,TiN膜层致密均匀,与基体结合良好,纳米硬度和弹性模量分别达到25和350 GPa;最低摩擦系数由基体的0.92下降到0.2.被处理薄膜试件在90%置信区间下的最大L_(10),L_(50),L_a和(?)寿命较基体分别提高了约4.5,1.8,1.3和1.2倍,疲劳寿命的分散性得到了显著改善.TiN hard protective films were fabricated on AISI52100 bearing steel substrate by plasma immersion ion implantation and deposition （PIII＆D） technique. The TiN films have been characterized using a variety of test methods. XRD analysis indicated that the TiN film contained a little amount of TiO2 and compounds of Ti, O and N, which has also been identified by XPS. AFM revealed the TiN film to be extremely smooth, very high uniformity and compact density over large areas. The maximum nanohardness and elastic modulus （E） of the sample after deposition of TiC are 25 and 350 GPa, increased by 127.3% and 59.1%, respectively. Ball-on disc result showed that the friction coefficients decrease from 0.92 to 0.2. The treated sample＇s rolling contact fatigue （RCF） life of the L10,L50,La and -↑L increases by 4：5, 1.8, 1.3 and 1.2 times, respectively. The RCF life scatter extent of treated sample is improved significantly.

关 键 词：等离子体浸没离子注入与沉积 TIN薄膜 机械性能 滚动接触疲劳寿命 轴承钢 

分 类 号：TG172.444[金属学及工艺—金属表面处理]