新功能材料微波与流控MEMS模拟与实践  

Analysis and Practice of New Function Material Microwave and Fluid Controlling MEMS Device

作　　者：葛羽屏[1] 纪江明[2] 王婉芳[1] 

机构地区：[1]上海电子信息职业技术学院 [2]复旦大学

出　　处：《电子材料与电子技术》2008年第1期5-9,共5页Electronic Material & Electronic Technology

基　　金：本文相关项目资助：2006年“上海高校选拔培养优秀青年教师科研专项基金”,上海市科教委员会.

摘　　要：理论分析与MEMS功能极为相关的多孔材料的若干特性；用系统的理论支持了多孔材料之引入；设计了一个微纳流控MEMS结构；研究微波／毫米波移相器的制备，给出了制备实图；然后阐述了典型结构功能分析与有限元方法结合的实践和解释，用ANSYS软件进行了模拟和比较，最后得出了有关结论。Theoretically analyzed a number of characteristics of porous material which are extremely related to MEMS functions;System theory was used to support the introduction of porous material;A micro-nano MEMS flow control structure was designed; Microwave/millimeter-wave phase shifter preparation was studied; The preparation real photo was given. Practice and interpretation of typical structure function combined with the finite element method was described, using ANSYS software to be simulated and compared, the final relevant conclusions were drawn.

关 键 词：微机电系统(MEMS) 有限元法 衬底 多孔硅 ANSYS 微波 

分 类 号：TN402[电子电信—微电子学与固体电子学] TS201.1[轻工技术与工程—食品科学]