超高纯氯气的大规模产业化生产  

Commercial Scale Process of Ultra High Purity Chlorine

作　　者：孙福楠[1] 吴江红[1] 冯庆祥[1] 

机构地区：[1]光明化工研究设计院,辽宁大连甘井子甘北路34号116031

出　　处：《低温与特气》2008年第1期1-2,共2页Low Temperature and Specialty Gases

基　　金：国家资金支持项目

摘　　要：超纯氯是半导体、光纤生产的重要原材料。近年来我国的半导体、光纤工业已从研究向产业化发展,作为重要电子气体的超纯氯将发挥重要的作用。为确保产品质量稳定、降低成本,对该产品进行产业化生产十分必要。Ultra purity chlorine is important raw material for production of semiconductor and optical fibre. In recent years , semiconductor and optical fibre industry have been developed from research to commercial scale process, ultra purity chlo- rine used as important electronic gases will play an important role. In order to ensure stablity in product quality and lower cost ,it is necessary to conduct commercial scale process of ultra purity chlorine.

关 键 词：超纯氯 吸附 低温精馏 

分 类 号：F416.71[经济管理—产业经济]