一种新型硅片传输机械手的设计  

The Design of the New Wafer-Handing Manipulator

作　　者：陈丁[1] 徐昌杰[1] 王瑜 程四化 

机构地区：[1]西安工业大学光电工程学院,陕西西安710032 [2]西安北方光电有限公司航控车间,陕西西安710034

出　　处：《科技信息》2008年第5期90-90,75,共2页Science & Technology Information

摘　　要：本文介绍一种实现精确、稳定、洁净传输的专用硅片机械手的组成与特点。该系统特殊的机构设计可避免接触硅片表面,使硅片在加工中受到的污染达最小。采用PLC控制各部功能,完成机械手的抓取、升降、旋转等运动。较同类型机械手,有着结构简单紧凑、稳定性好等特点。The paper introduces the composition, characteristics of a kind of special water-handing manipulator that can transport silicon water accurately, steadily, and cleanly. In this system, the mechanism of the manipulator is designed especially, so it avoids touching the top of silicon water directly, and the level of pollution of silicon water reduces to the least in process. Through adopting PLC, the system can control all kinds of movements, and it makes water-handing manipulator grasp, up-down, and rotate. Compared with other manipulator, its structure is sample, compact, and the operational reliability is good.

关 键 词：机械手 机构 PLC 精确传输 

分 类 号：TN309.12[电子电信—物理电子学] TH112[机械工程—机械设计及理论]