激光合成波长纳米测量干涉仪的非线性误差分析  

Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer

作　　者：陈本永[1] 穆瑞珍[1] 周砚江[1] 李达成[2] 

机构地区：[1]浙江理工大学纳米测量技术实验室,浙江杭州310018 [2]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《中国激光》2008年第2期240-244,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(50275138,60575055)资助项目

摘　　要：描述了激光合成波长纳米测量干涉仪的测量原理,分析了非线性误差对该干涉仪的影响,得出了由偏振光非正交、椭偏化和光学元件偏振非正交及椭偏化等对该干涉仪造成的非线性误差为偏振态误差的二阶或高阶小量。进行了激光合成波长纳米测量干涉仪和激光外差干涉仪的对比实验,结果表明激光合成波长纳米测量干涉仪的最大误差为2.1nm,优于激光外差干涉仪的最大误差7.5nm,验证了激光合成波长纳米测量干涉仪的优越性。The principle of laser synthetic wavelength nanomeasurement interferometer is described. The nonlinear errors which affect on this interferometer are analyzed. Theoretical analysis resuhs show that nonlinear errors caused by nonorthogonal polarization, elliptic polarization of laser source, nonidea[ polarization beam splitter and corner prism are second or higher order polarization error, the comparable experiment of laser synthetic-wavelength nanomeasurement inteferometer and a heterodyne interferometer was performed. The maximal error of laser synthetic-wavelength nanomeasurement inteferometer is 2.1 nm, while the maximal error of heterodyne interferometer is 7.5 nm.

关 键 词：测量 干涉仪 合成波长 非线性误差 偏振光非正交 

分 类 号：TH744.3[机械工程—光学工程]