氮化碳薄膜的红外吸收光谱(FTIR)研究  

FOURIER TRANSFORM INFRARED SPECTROSCOPY STUDIES OR CARBON NITRIDE THIN FILMS

作　　者：彭友贵[1] 傅强 叶明生[1] 张志宏[1] 吴大维[1] 王国梅[2] 

机构地区：[1]武汉大学物理学系 [2]武汉工业大学硅酸盐工程系

出　　处：《武汉大学学报（自然科学版）》1997年第5期637-640,共4页Journal of Wuhan University(Natural Science Edition)

基　　金：国家自然科学基金

摘　　要：测量了采用ＲＦ－ＣＶＤ方法制备的氮化碳薄膜的ＦＴＩＲ曲线，膜层中的Ｃ—Ｎ键、石墨相、ＣＮ键和ＣＮ键的红外吸收峰波数分别为１２５０ｃｍ－１，１５７６ｃｍ－１，１６８７ｃｍ－１和２０５４ｃｍ－１．采用技术措施避免石墨相析出的氮化碳薄膜，其红外吸收谱只出现了Ｃ—Ｎ键的伸缩振动吸收峰（９４８ｃｍ－１）．薄膜中的其它功能基团的存在对Ｃ—Ｎ键的振动频率有一定的影响．The fourier transform infrared(FTIR) spectrum of carbon nitride thin films prepared by radio frequency chemical vapour deposition(RF CVD) were investigated. The result shows that absorption peaks of the Covalent C—N bond,graphitc phase,carbon nitrogen double bond and carbon nitrogen triple bond are at 1 250 cm -1 ,1 567 cm -1 ,1 687 cm -1 and 2 054 cm -1 respetively.After technical measures were taken,the formation of graphitc carbon nitride in the films was avoided,only C—N stretching vibration absorption peak,the 948 cm -1 , appears in the FTIR spectra.The presences of other functional groups contribute to the shift of C—N bond vibration frequency.

关 键 词：红外吸收光谱 超硬材料 氮化碳薄膜 定量分析 

分 类 号：O484.5[理学—固体物理]