磁控溅射类石墨镀层结构的Raman光谱和XPS分析  

Raman Spectra and XPS Analysis of the Structure of Graphite-Like Carbon Coatings Deposited by Magnetron Sputtering

作　　者：严少平[1] 蒋百灵[1] 苏阳[1] 张永宏[1] 

机构地区：[1]西安理工大学材料科学与工程学院

出　　处：《西安理工大学学报》2008年第1期8-12,共5页Journal of Xi'an University of Technology

基　　金：国家863科技攻关资助项目(2005AA33H010)

摘　　要：利用非平衡磁控溅射离子镀技术在单晶硅片上沉积了类石墨碳镀层，采用X射线衍射（XRD）、激光Raman光谱和X射线光电子能谱（XPS）等分析方法对镀层的微观结构进行了研究。结果表明：不同成份类石墨碳镀层的Raman光谱与宽化的多晶石墨Raman光谱相似，类石墨碳镀层是以sp。键结构为主，且舍有多种纳米团簇颗粒的非晶镀层，sp^3键含量在12～15％范围；根据高斯解谱计算，镀层中碳团簇线度为1．2nm以下，并随铬含量增高而减小；镀层主要由单质碳、铬及其铬氧化物组成，并随铬含量增高，逐步有碳铬化合物形成。Graphite-like carbon coatings were deposited on silicon wafers substrate by unbalanced magnetron sputtering technique. The microstructures of coatings were investigated by X-ray diffraction （XRD）, Laser Raman spectrum and X-Ray Photoelectron Spectrometer （XPS）, respectively. The results indicate that Raman spectra of coatings with different microstructure are similar to those of polycrystalline graphite widened. The carbon coatings are amorphous coatings which mainly bonded by sp^3 and contained several kinds of nano-cluster particles the content of sp^3 bond is in the range of 12%-15%. According to the Gauss analytic calculation, the size of carbon cluster in coatings is less than 1.2 nm, and decreases with Cr increasing. Graphite-like carbon coatings mainly consist of pure carbon, chromium and their oxides; and along with an increas eng in chromium contents, the chromium carbide CrxC can forms in coatings.

关 键 词：非平衡磁控溅射 类石墨碳镀层 微结构 RAMAN光谱 X射线光电子能谱 

分 类 号：O484.5[理学—固体物理] TH117.3[理学—物理]