边缘场致发射体的非正交有限差分算法模拟  

Simulation of Disk-edged Field Emitters Using FDM in Non-Orthogonal Curvilinear Coordinate System

作　　者：汪琛[1] 赵宏卫[1] 王保平[1] 童林夙[1] 

机构地区：[1]东南大学电子研究所,南京210018

出　　处：《真空科学与技术》1997年第5期321-325,共5页Vacuum Science and Technology

摘　　要：对边缘切致发射三极管进行了模拟，采用的模型为“鸡尾酒杯”结构。在静电分析中引入了一种新的数值计算方法──非正交曲线坐标系下的有限差分算法。由于取的坐标轴与边界重合。所以该方法能有效地处理任意形状的场致发射体。给出了电场强度和发射电流与几何因子的关系及I－U特性曲线。A new numerical algorithm, finite -difference method in non-orthogonal curvilinear coordinate system(FDM-NOCCS),is proposed to simulate the disk-edged field emission triode . With the boundary-conforming coordinate lines,this method works well with arbitrary shaped microemitters.The simulation results are presented for a unit cell,consisting of a disk-edged field emitter with 'cocktail glass'structure,a gate,and an anode. The dependence of the field enhancement factor and the emitted current upon geometrical factors are discussed.

关 键 词：真空微电子学 场致发射 有限差分法 CAD 

分 类 号：TN101[电子电信—物理电子学]