电子背散射衍射技术在材料显微分析中的应用  

Application of Electron Backscattered Diffraction to Microscopic Analysis of Materials

作　　者：王疆[1] 孙学鹏[2] 郦剑[2] 

机构地区：[1]辽宁科技大学高等职业技术学院,辽宁鞍山114044 [2]浙江大学金属材料研究所,浙江杭州310027

出　　处：《热处理》2008年第2期41-44,共4页Heat Treatment

摘　　要：介绍了电子背散射衍射的原理、装置的构造、分析方法及其应用。电子背散射系统(EBSD)与能谱(EDS)和扫描电镜一起工作可同时分析试样特定微区的形貌、成分和取向。当电子束逐点扫描分析时,还可获得一种全新的图象即晶体取向分布图,从而获取微区的形貌、成分及成分的定量分布图。以纯铁为例,对该技术进行了验证。The principle, equipment constitution, analytical method and application of electron backscattered diffraction（EBSD） were discussed. Associated with the energy dispersive spectrometry and scanning electron microscope, EBSD could simultaneously analyze morphology, composition and orientation of the selected micro-area of the sample, when the electron beam scanned the sample point by point, a new crystal orientation distribution image would be obtained, and as a result the morphology, composition and quantitative distribution image of the composition of the observed micro-area would be obtained too. Taking pure iron as an example, the EBSD was verified.

关 键 词：电子背散射衍射 扫描电镜 晶体取向 电子背散射衍射花样 

分 类 号：TG115.23[金属学及工艺—物理冶金]