基于蒙特卡罗方法的光固化模拟  

Simulation of Light Solidification Based on the Monte Carlo Method

作　　者：裴香涛[1] 王翔[1] 邵鹏[1] 黄文浩[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230026

出　　处：《光子学报》2008年第4期625-630,共6页Acta Photonica Sinica

基　　金：国家自然科学基金(50335050);国家高技术研究发展计划(863)(2006AA04Z311)资助

摘　　要：采用蒙特卡罗方法分析了光子在树脂中的输运过程,建立了紫外光单点固化模型,并进行了单点固化过程的模拟计算,通过曝光固化实验验证了该算法的可靠性.理论模拟和实验结果表明,当曝光能量达到临界值,固化点的高度和直径随曝光时间、功率的增大呈对数关系增大.利用该算法可以模拟各种不同光强分布的曝光固化过程,为加工分辨率的提高和工艺参量的优化提供理论基础.The transition process of photons in the resin is studied based on method of Monte Carlo （MC）. The model of UV-solidifying point is constructed, the simulated calculation of single-point solidifying process is carried out,and the reliability of the model is confirmed by the curing exposure experiments. The results of simulated calculations and solidifying experiments indicate that, when the exposure intensity exceed the critical value,the depth and diameter of solidifying point logarithmically increase following with the increasing exposure time and power. The different solidifying processes with various conditions of laser intensity distribution can be simulated by the model, to the benefit of effective prototyping precision and optimized technical parameters.

关 键 词：微细加工 光成型技术 光固化 蒙特卡罗 数值模拟 

分 类 号：TN23[电子电信—物理电子学] TB114[理学—概率论与数理统计]