用于系统级仿真的MEMS器件宏模型研究现状  

Research status of macro-modeling of MEMS devices for systems level simulations

作　　者：林谢昭[1] 应济[2] 

机构地区：[1]福州大学机械工程及自动化学院,福建福州350002 [2]浙江大学机械与能源工程学院,浙江杭州310027

出　　处：《传感器与微系统》2008年第4期8-11,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(5010502050475104)

摘　　要：微机电系统(MEMS)的未来在于有稳定数量且不断壮大的新型产品能成功地转化为商品,这关键在于将计算机引入到MEMS设计、制造全过程。阐述了MEMS CAD的复杂性和困难。对MEMS CAD的分层设计思想作了简要介绍,着重对现有的MEMS器件宏模型的建模方法和模型的描述与其国内外研究现状与发展方向进行介绍和总结,认为宏模型研究的重点将是器件非线性特性的有效表达和建模过程自动化的计算机实现,并对今后的研究发展提出一些建议。The key of commercial successes of MEMS rests with computer aided methodology in the field of MEMS design and manufacture. The reason that causes MEMS design complexity and hardship is discussed. The hierarchy of MEMS CAD is introduced. The state of research in MEMS macro-modeling approaches at home and abroad are also introduced and summed up. The emphases are aimed at the MEMS devices compact-modeling （order-reduced modeling） methods and the macro-model＇ s representation. The two keystones in the nonlinear macro-modeling are the representation of the original system＇ s nonlinear characteristics and the realization of automatic model reduction. Some suggestions for the further researches are proposed.

关 键 词：宏模型 系统级模拟 计算机辅助设计 微机电系统 

分 类 号：TN405[电子电信—微电子学与固体电子学] TH16[机械工程—机械制造及自动化]