一种基于MEMS的主动式光纤连接器  

MEMS-based active optical fiber connector

作　　者：张丹[1] 丁桂甫[1] 蔡玉丽[1] 王艳[1] 杨卓青[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《传感器与微系统》2008年第4期92-93,96,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(10377009);上海市光科技计划资助项目(DZ46105008)

摘　　要：介绍一种基于MEMS技术的主动式光纤连接器,上层为双层结构电热驱动器,下层为硅V型槽。双层结构在常温下作为压制光纤的盖板,通电后作为单稳态电热驱动器,盖板翘曲,放入或取出光纤。利用Ansys有限元分析软件并结合工艺条件,对热驱动器部件的性能进行了分析与仿真。利用表面硅工艺和体硅工艺制备出核心驱动部分,检测盖板翘曲情况下性能。An optical fiber connector based on MEMS technology is presented. Nickel thin film cover plate is manufactured on the SiO2 layer above the silicon Ⅴ-shaped groove to form two-layers structure. This structure can be both used as a cover plate under normal temperature and a electro-thermal micro actuator in the temperature rising process. Optical fiber can be put into the V-groove when the two-layers structure warps during this process. The relationship between the structure parameters and the thermal actuator＇ s capability is simulated and analyzed by Ansys,the optimize structure is got.

关 键 词：光纤连接器 微机电系统 双层薄膜 

分 类 号：TN253[电子电信—物理电子学] TN929.11