MEMS扭转疲劳试验装置设计研究  

Design of MEMS Torsion Fatigue Testing Device

作　　者：贾冠华[1] 尚德广[1] 孙国芹[1] 刘豪[1] 马新平[1] 

机构地区：[1]北京工业大学机电学院,北京100022

出　　处：《机械设计与研究》2008年第2期50-53,共4页Machine Design And Research

基　　金：国家自然科学基金资助项目(50575004);北京市拔尖创新人才资助项目

摘　　要：设计了一种平行板电容驱动MEMS扭转疲劳试验装置。通过理论分析和有限元分析两种方法去预测该装置的吸附电压,并将所得结果进行对比,证明两种方法具有一致性。最后通过对比试验结果与理论计算结果证实了该理论分析方法的有效性。同时也就证实了有限元分析方法的有效性。通过有限元分析得到的疲劳试样应力分布情况表明该装置可以达到MEMS疲劳测试所要求的应力水平。A novel MEMS fatigue testing device driven by electrostatic force of parallel plate condenser was proposed. The Pull-in voltage is analyzed by both the theoretical analysis and the FEA methods, and the agreement of the results proved the consistency of two methods. The validity of the theoretical analysis method was proved by comparing its result with experimental result; at the same time, the validity of FEA method was verified as well. The stress＇distribution of fatigue testing sample gained by means of FEA indicated that the sample stress can achieve the required level for MEMS fatigue testing.

关 键 词：MEMS 扭转疲劳 有限元分析 吸附电压 耦合场分析 

分 类 号：TH873.3[机械工程—仪器科学与技术] TB302.3[机械工程—精密仪器及机械]