MEMS加速度计敏感元件测试仪的设计与实现  

Design and realization of testing instrument applied to MEMS accelerometer sensor

作　　者：李童杰[1] 董景新[1] 刘云峰[1] 孔星炜[1] 赵长德[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《国外电子测量技术》2008年第4期23-26,41,共5页Foreign Electronic Measurement Technology

摘　　要：基于敏感元件的特性本文设计出了一种MEMS加速度计敏感元件特性测试仪,即利用电容检测电路和基于虚拟仪器的频谱测试仪对MEMS敏感元件的频谱特性进行测试而得出其重要性能参数。电容检测电路和虚拟仪器频谱测试仪分别在实验室内进行了误差分析,电容检测电路的最大非线性误差为0.127 7%,频率特性测试仪的幅值最大误差为0.352 6 dB,相位最大误差为1.365 6°。This paper presents a MEMS sensor testing instrument, which is composed of a capacitance measuring circuit and a virtual instrument （VI） spectrum analyzer. This instrument has the function of obtaining a certain important parameters of the MEMS sensor automatically through capacitance measuring, VI spectrum analyzing and the VI program. The capacitance measuring circuit and spectrum analyzer are calibrated separately in the lab. The maximal nonlinear error of the capacitance measuring circuit is 0. 127 7%;the maximal amplitude error of the spectrum analyzer gets 0. 352 6 dB and the maximal phase error reaches 1.365 6°.

关 键 词：MEMS加速度计 敏感元件 虚拟仪器 频谱分析仪 

分 类 号：TH824.4[机械工程—仪器科学与技术]