纳米电机驱动大行程超精密工作台的设计研究  被引量:8

Research on Design of Large Travel Ultra Precision Stage Driven by Piezoceramic Motor

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作  者:范伟[1] 余晓芬[1] 奚琳[1] 

机构地区:[1]合肥工业大学仪器科学与光电工程学院,合肥230009

出  处:《电子测量与仪器学报》2008年第2期42-45,共4页Journal of Electronic Measurement and Instrumentation

基  金:国家自然科学基金国际重大合作项目(编号:50420120134)

摘  要:介绍了一种由压电陶瓷拨爪电机驱动的一维纳米级定位精度工作台的工作原理及其设计。压电陶瓷拨爪电机可以避免使用传统的粗精两级定位机构,直接实现纳米级驱动定位。针对压电陶瓷拨爪电机的特性,设计了低摩擦的磁悬浮导轨,并采用分体式结构和柔性铰链,将驱动系统与定位工作台隔离,从而有效减少了压电陶瓷拨爪电机在驱动时产生的高频震动对定位精度的影响。固定在工作台上的直光栅实现了对工作台位移的高精度闭环检测。经测试,工作台可以实现0-200mm范围,10nm分辨率的快速、高精度定位,满足纳米测量的要求。The operating principle and design of one dimension positioning stage with nanometer resolution driven by piezoceramic motors is described. Piezoceramic motor can realize localization with nanometer resolution directly without conventional two-level drive. According to the characteristics of piezoceramic motor, a low-friction magnetic suspension guide way was designed, and the stage adopts separate structure and flexure hinges to separate driving system from positioning stage, which effectively reduces the effect of high frequency vibration generated by piezoceramic motor. The optical grating linear encoder fixed on the stage can realize high accuracy closed loop measurement for the displacement of the stage. Through testing, the stage can realize fast and high accuracy positioning with 10nm resolution within a range from 0 -20cm, and satisfy the nanometer measurement needs.

关 键 词:压电陶瓷拨爪电机 纳米工作台 磁悬浮导轨 柔性铰链 光栅 

分 类 号:TH7[机械工程—仪器科学与技术]

 

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