Ba_(0.6)Sr_(0.4)TiO_3溅射靶材的烧制和性能分析  

Fire process and performance analysis of High-intensity Ba_(0.6)Sr_(0.4)TiO_3 target

作　　者：张龙[1] 朱健[1] 卓敏[1] 

机构地区：[1]南京电子器件研究所,南京210016

出　　处：《功能材料与器件学报》2008年第2期358-361,共4页Journal of Functional Materials and Devices

基　　金：单片集成电路与模块国家级重点实验室基金资助(No.9140C1405020607)

摘　　要：介绍了BST压电陶瓷靶的烧制方法,使用添加剂改善了Ba0.6Sr0.4TiO3靶材的结构和性能,解决了BST靶材热稳定性差的问题,同时优化了BST靶材的晶化效果,提高介电性能。实验通过XRD衍射和P-E试验分析了所制BST溅射靶的微结构和铁电特性。The progress of fabricating the high - intensities Ba0.6 Sr0.4 TiO3 target, and meliorated its performance, that solved the ubiquitous difficult problem, low high temperature resistance stability of BST target were presented. A small quantity of additive can promote nucleation and increase the BST films di- electric performance. This paper provides the XRD and P - E testing results, which indicates this BST target has crystalloid structure and good ferroelectric performance.

关 键 词：BST 压电陶瓷 热稳定性 XRD衍射 P—E试验分析 

分 类 号：TN304.9[电子电信—物理电子学]