微机械加速度计自动测试系统  

Automatic measuring system of MEMS accelerometer

作　　者：胡佩达[1] 董景新[1] 赵长德[1] 李童杰[1] 孙宵[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2008年第2期212-215,共4页Journal of Chinese Inertial Technology

基　　金：国防科技预研项目(51309050809))

摘　　要：为了精确、高效地测量微机械加速度计的各项性能指标,并尽可能地降低地线干扰,系统采用DAQ-2213数据采集卡采集加速度计输出电压,使用多个独立电源及差模接法来降低地线干扰;温度敏感元件采用Pt100,电阻到电压变换电路采用三线制接法,选择PCI-(A)9114数据采集卡采集变换电路输出的电压值;采用Labview7.0接口函数实时显示加速度计输出电压和温度值,并输出有图表的Word文档。系统经过标定,输出电压精度为40μV,温度精度为0.277℃。实验表明,系统能实时测量微机械加速度计的输出电压和温度值,而采用独立电源和差模输入可有效减少各路信号之间的干扰。To obtain high precision and efficiency and avoid grounding wire interference, the DAQ-2213 Data Acquisition Card was used to measure the output voltage of MEMS Accelerometer. Several independent Power Sources and differential modes were used to depress the grounding wire interference. Pt100 was used to sense the temperature, and jointed to the hardware circuit by three electrical wires. PCI-（A）9114 Data Acquisition Card was chosen to measure the output voltage of converter. Then using the software developed with Labview7.0 to process the data automatically and produce Microsoft Office Word document to record the information in the form of pictures and tables. The precision of the output voltage is 40 μV, and the temperature is 0.277℃. Experimental results show that the system can measure the output voltage and the temperature timely and precisely. The signal interference is reduced by using independent power source and differential input mode.

关 键 词：微机械加速度计 自动测试 多路采集 地线干扰 标定 

分 类 号：U666.1[交通运输工程—船舶及航道工程]