电容式微机械陀螺敏感信号采样检测  

Sample detection of capacitive micromachined gyroscope sensing signal

作　　者：陈建元[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《中国惯性技术学报》2008年第2期233-235,共3页Journal of Chinese Inertial Technology

摘　　要：驱动轴与敏感轴的刚度耦合是硅微陀螺的机械耦合干扰是主要因素。敏感方向的电容对所有间隙变化进行检测,机械耦合造成了虚假的敏感信号输出,这种输出也会带来后续放大器的饱和问题。以往诸多相关检测方法,将敏感信号与耦合干扰一起送入乘法器。使有用的敏感信号的最后提取产生困难。文中分析指出存在干扰影响最小的可供对敏感信号采样时刻。这个采样时刻靠近敏感信号的峰值点。用取样积分的方法可以进一步提高信噪比。驱动电压也对敏感信号存在严重的干扰,因此使用了在采样时关断驱动信号的方法去除这种电气干扰。两方法结合减少了机械耦合干扰和电气耦合干扰,减少了系统误差。The interference of mechanical coupling between driving and sensing direction is inevitable, and the rigidity coupling between driving and sensing axis is the main factor. The sensing capacitance detect all the clearance change, while the mechanical coupling generate illusive sensing signal which bring out the saturation problems in subsequent picking-up of useful sensing signal. The paper point out that there exits a sample time when the coupling is minimal. It is close to the peak value point of sensing signal. So the BOXCAR integrator method can further increase S/N ratio. Since the driving voltage could also badly disturb the sensing signal, another method is to stop the driving signal in sample time. The combination use of the two methods has reduced the mechanical coupling and electric coupling as well as the system error.

关 键 词：微机械陀螺 机械耦合 调理电路 取样积分器 

分 类 号：U666.1[交通运输工程—船舶及航道工程]