类金刚石膜的性能、制备及其应用  

Properties,Processing and Application of Diamond-like Carbon Film

作　　者：杨玉卫[1] 杨坚[1] 古宏伟[1] 刘慧舟[1] 张华[1] 金薇[1] 

机构地区：[1]北京有色金属研究总院超导中心,北京100088

出　　处：《硅酸盐通报》2008年第1期119-126,共8页Bulletin of the Chinese Ceramic Society

摘　　要：类金刚石膜是无定形碳中含sp3键的亚稳态结构。由于它的组成、光学透过率、硬度、折射率和在化学腐蚀剂中的惰性以及抗摩擦性能十分相似于金刚石,其应用领域不断被拓宽,因此对类金刚石的研究也日益成为热点。本文介绍了类金刚石的性能、制备类金刚石膜的物理气相沉积和化学气相沉积方法,概括了类金刚石膜在机械、电磁学、光学、医学以及其它领域的应用,最后指出了类金刚石膜的研究现状及其发展趋势。Diamond-like carbon （DLC） is a metastable form of amorphous carbon containing a significant fraction of sp^3 bonds. Due to the similarity of the makeup, optical transmittance, hardness, refractive index, the inertness in chemical corrosive and friction properties with Diamond, DLC has drawn everincreasing attention and its application areas are widening. In this paper DLC＇s properties, physical vapor deposition and chemical vapor deposition of the Diamond-like Carbon Film are introduced. Also, the DLC film is described with the applications in the mechanical area, electromagnetic area, optical area, medical area and other areas. Finally, the further study tendency was pointed out.

关 键 词：类金刚石薄膜 制备工艺 应用 

分 类 号：O484.4[理学—固体物理]