ECR微波等离子体源离子输运的蒙特卡罗模拟  

A MONTE CARLO SIMULATION OF ION TRANSPORT IN ECR MICROWAVE PLASMA

作　　者：温晓军 宫野[1] 王德真 邓新绿 

机构地区：[1]大连理工大学物理系

出　　处：《核聚变与等离子体物理》1997年第4期36-40,共5页Nuclear Fusion and Plasma Physics

基　　金：国家自然科学基金

摘　　要：采用蒙特卡罗方法，模拟了ＥＣＲ微波等离子体源中离子离开放电室后历经中性区、鞘层区，最后被加负偏压的工件表面吸收的全过程。研究了鞘层边界处的衔接问题，得到了自洽电势分布和鞘层区不同位置处的速度分布、能量分布与角分布。同时，讨论了磁场对鞘势的影响。The complete course that ions leave the source region, pass through the neutral region and the sheath and are finally absorbed by the face of the target with negative bias in an ECR microwave plasma, is simulated by using the Monte Carlo method. Ion neutral charge exchange and elastic scattering are taken into account. We have studied the joint of the neutral region and the sheath at the sheath edge and obtained the distributions of velocity, energy and angle at any point of the sheath. The effect of magnetic field on the sheath potential is discussed.

关 键 词：蒙特卡罗模拟 ECR 等离子体源 离子输运 

分 类 号：O531[理学—等离子体物理]