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出 处:《微电机》2008年第5期80-82,共3页Micromotors
基 金:国家自然科学基金项目(50277006)
摘 要:叠层型压电陶瓷利用逆压电效应可以得到精确的微位移量。介绍了叠层型压电驱动器的性能特性。并基于正交三角放大原理设计了一种微位移放大机构,使其将叠层型压电微位移器的位移量放大。实验结果表明,驱动器各项指标均达到设计要求,证明了设计理论的正确性。Piezoelectric stack was used as an actuator to get a precision micro displacement, using converse piezoelectric effect. Briefly introduced the characteristics and advantages of piezoelectric actuator's construction, and a ciples of orthogonal micro-displacement amplifying mechanism was presented, which based on the printriangle amplification. The amplifier was driven by piezoelectric stack actuators. The displacement of piezoelectric actuators was amplified by the amplifying mechanism. Then the experiment and analysis of the characteristics for the prototype were carried out. All design parameters achieved and the design theory also prove its correctness in the experiment.
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