硫化锌薄膜的制备和结构分析  

Preparation and Structure Analysis of Zinc Sulfide Thin Film

作　　者：柳兆洪[1] 刘瑞堂 孙书农[1] 陈振湘[1] 胡启富[1] 邱伟彬[1] 纪安妮[1] 林爱清[1] 

机构地区：[1]厦门大学物理系,361005

出　　处：《固体电子学研究与进展》1997年第4期347-350,共4页Research & Progress of SSE

基　　金：福建省自然科学基金

摘　　要：用常规分舟热蒸发法在玻璃衬底上制备硫化锌薄膜，用X射线衍射和透射电子显微镜研究该薄膜的晶体结构，发现硫化锌薄膜与流化锌粉末在晶体结构上存在差异，实验证实硫化锌晶体是具有高于性的共价键晶体。The zinc sulfide thin films have been prepared on glass substrate by thermal evaporation with two separate boats in vacuum. After studing the films with X-ray diffraction (XRD) and transmission electron microscope (TEM), structures of the film and the powder of ZnS are found to be different. The experimental results indicate that the crystalline of the zinc sulfide is the one of covalent bond with ionicity.

关 键 词：硫化锌薄膜 化合物半导体 薄膜 

分 类 号：TN304.25[电子电信—物理电子学] O484.1[理学—固体物理]