微转子系统径向气体轴承特性  

Characteristics of the Gas Journal Bearing in Micro-rotor Systems

作　　者：张文明[1] 孟光[1] 陈迪[2] 

机构地区：[1]上海交通大学机械系统与振动国家重点实验室,上海200240 [2]上海交通大学微纳科学研究院,上海200030

出　　处：《机械工程学报》2008年第5期25-33,共9页Journal of Mechanical Engineering

基　　金：国家杰出青年基金(10325209);国家自然科学基金(10602033，50575132);中国博士后基金(20060400165)资助项目。

摘　　要：充分考虑滑移边界条件的影响,利用数值计算方法对微机电系统(Micro-electro=mechanical systems,MEMS)中微转子系统径向气体轴承的雷诺方程进行修正求解,得到轴承内部真实的气压分布,进而求得微气体轴承的承载能力和偏位角。通过与宏观无限短轴承模型的结果进行对比分析,发现滑移效应对气体轴承特性的影响规律。宏观无限短轴承模型和无滑移边界模型均会高估气体轴承的承载能力,特别是偏心率较高时(ε>0.6),产生的偏差更大;微转子系统在高速或超高速工况下运转,可以提高气体轴承的气压和承载能力。Considering the boundary conditions due to the slip effect, the modified Reynolds equation is applied to investigate the dynamical lubrication characteristics of the gas bearing of micro-rotor system in micro-electro-mechanical systems （MEMS）, the real pressure distribution in the interior of the bearing, the load carrying capacity and the attitude angle are obtained by using numerical calculation method. The characteristics of micro-lubricated gas journal bearings compared with those obtained from macro infinite short bearing indicate that the slip effect has great impact on the dynamical lubrication characteristics of gas bearing. The macro infinite short bearing model and the bearing model without slip effect will overestimate the load carrying capacity of the gas bearing, particularly in the range of high eccentricity ε（ε〉0.6）, i.e., the discrepancy will be larger. When the micro-rotor system runs at high-speed or super high-speed, the pressure and load carrying capacity of the gas bearing can be improved.

关 键 词：微机电系统 气体轴承 滑移效应 

分 类 号：TH117.2[机械工程—机械设计及理论] TH133