ZrO2电解质陶瓷与Al的阳极键合连接机理分析  

Anodic Bonding Mechanism of ZrO_2 Electrolyte Ceramics and Al

作　　者：刘翠荣[1] 孟庆森[1] 鲁小莹[1] 刘子建[2] 

机构地区：[1]太原理工大学材料科学与工程学院,太原030024 [2]太原科技大学材料科学与工程学院,太原030024

出　　处：《机械工程学报》2008年第5期114-118,共5页Journal of Mechanical Engineering

基　　金：国家自然科学基金(50375105，50671070)。

摘　　要：在一定连接工艺参数下,进行ZrO_2电解质陶瓷与Al的阳极键合工艺试验,并在万能电子材料试验机上对ZrO_2电解质陶瓷与Al的阳极键合连接接头进行剪切强度试验。采用扫描电镜、超轻元素能谱仪及X射线衍射仪分析连接界面微观组织、成分分布、界面相结构及剪切断口。试验结果表明,ZrO_2的表面活化处理提高了ZrO_2/Al的连接性,结合界面在阳极键合条件下形成高的氧离子迁移率及静电场力是促进结合的主要因素;过渡区ZrO_2-SiO_2-Al_2O_3的多界面固相反应是结合形成的主要原因;ZrO_2/Al接头的剪切断裂位置位于ZrO_2与过渡区的结合界面,启裂区位于ZrO_2的近界面区,扩展并终断于Al与过渡区界面:终断区断口形貌表明Al/过渡区界面具有较高的接合质量。The technological experiment of anodic bonding is carried out between ZrO2 electrolyte ceramics and metal Al. Under certain technological parameters, and on universal electronic material testing machine, the test of shearing strength is carried out on the anodic bonding joint between ZrO2 electrolyte ceramics and metal Al. By means of the scanning electron microscope, super-light element energy spectrometer and X-ray diffraction instrument, the microstructure of joint interface, element distribution, phase structure of interface and shearing section are analyzed. Experimental results are as follows： The ZrO2 surface activating treatment has improved the ZrO2/Al joint; the high oxygen ion mobility caused by the joint interface under the condition of anodic bonding and the electrostatic field force are the major factors to promote the bonding; the multi-interface solid phase reaction of ZrO2-SiO2-Al2O3 in transition region is the main cause for the formation of bonding; the location of shear fracture of ZrO2/Al joint is on the bonding interface between ZrO2 and transition region, the initial crack area is located on the near interface of ZrO2, then extends and ends on the interface between metal Al and transition region; the morphology of fracture in the terminate area shows that the Al/transition region interface has high joint quality.

关 键 词：ZrO2导电陶瓷 铝 阳极键合 连接界面 微观结构 连接机理 

分 类 号：TG457[金属学及工艺—焊接]