Cr含量对掺铬类石墨镀层摩擦学性能的影响  

Influence of chromium content on the tribological properties of graphite-like carbon coatings doped with chromium

作　　者：严少平[1] 蒋百灵[1] 段冰[1] 

机构地区：[1]西安理工大学材料科学与工程学院

出　　处：《金属热处理》2008年第5期48-52,共5页Heat Treatment of Metals

基　　金：国家863科技攻关项目(2005AA33H010)

摘　　要：采用4靶非平衡磁控溅射离子镀技术,在高速钢和硅基体上制备出不同Cr含量的掺铬类石墨镀层,研究了类石墨镀层的显微硬度、摩擦系数和比磨损率,分析了Cr含量对镀层的表面、断面形貌及微观结构的影响。结果表明,随Cr含量的增加,类石墨镀层硬度逐渐降低;摩擦系数和比磨损率先降后升;镀层由非晶逐步变成有择优生长趋势的纳米晶与非晶混合多层结构。当Cr含量在2wt%~10wt%时,镀层表面光滑而结构致密,镀层C、Cr成分均匀分布,硬度为19.8~21.4GPa,最小的摩擦系数为0.045和最低比磨损率1.32×10-16m3/N.m,具有良好的减摩耐磨性能。Graphite-like carbon（GLC） coatings doped with different chromium contents were prepared by four targets unbalanced magnetron sputter ion plating technique on single crystal silicon and high speed steel（HSS） substrate, The micro-hardness ,friction coefficient and specific wear rate of the coatings were studied ,and the influence of chromium content on the surface, section morphology and mierostruetures of the coatings were analyzed. The results show that with the increasing of chromium content the micro-hardness of the coatings decreases gradually, friction coefficient and the specific wear rate decrease first and then increase, and the coating layers transform from non-crystalline to mixed multi-layer structure of nanoerystalline and non-crystalline. While the content of chromium is in the range of 2 wt% to 10wt%, smooth and compact GLC are deposited with well distribution of C and Cr, the micro-hardness is between 19.8 - 21.4 GPa, minimums friction coefficient 0. 045 ,minimums specific wear rate 1.32 × 10^-16 m^3/N. m ,and the coatings possess well friction-reducing and antiwear abilities.

关 键 词：类石墨镀层 摩擦学性能 非平衡磁控溅射 结构 

分 类 号：TH117.3[机械工程—机械设计及理论] TG156.99[金属学及工艺—热处理]