金属和陶瓷配副件条件下TiN薄膜的摩擦学特性  

Investigation on Tribological Properties of TiN Films at Different Counterparts

作　　者：谢红梅[1] 张碧云[1] 卢春灿[1] 聂朝胤[1] 

机构地区：[1]西南大学材料科学与工程学院,重庆400715

出　　处：《表面技术》2008年第3期9-11,32,共4页Surface Technology

基　　金：重庆市自然科学基金资助项目(2006BB4050);西南大学科技基金资助项目(SWNUF2005001;SWNUB2005001)

摘　　要：多弧离子镀TiN薄膜具有广泛的应用。采用多弧离子镀技术在不锈钢衬底表面沉积了TiN薄膜。用显微硬度计测试了TiN薄膜的硬度,用往复球-盘式摩擦磨损试验机评价了在GCr15和S i3N4两种不同配副件及空气中干摩擦条件下TiN薄膜的摩擦学性能,用表面轮廓仪测试了磨痕处的磨痕轮廓,用配有能谱仪(EDS)的扫描电镜(SEM)和X射线光电子能谱(XPS)观察和测试了磨痕形貌和磨痕处主要化学元素组成,用金相显微镜观察了配副件磨损表面形貌。结果表明:在不同配副件条件下,TiN薄膜的摩擦因数随速度和载荷的增加均出现了降低的趋势。而在相同速度和载荷下,以GCr15为配副件时TiN薄膜的摩擦因数小于以S i3N4为配副件时的摩擦因数。以S i3N4为配副件时TiN薄膜主要表现为磨粒磨损。以GCr15为配副件时TiN薄膜几乎没有磨损,而配副件GCr15主要表现为磨粒与粘着磨损。The applications of TiN films are extensive. TiN films on stainless steel substrate were repared using multi-arc ion plating technique. The surface hardness of the film was measured with＇micro hardness tester. The wear resistance of TiN films were studied using different counterparts by the ball-disk wear tester. Wear surface morphology of counterparts were investigated by OM. SEM, EDS and XPS were employed to characterize the morphology and chemical composition of wear grooves in the films. The analysis results show that the friction cofficent of TiN film is reduced with the increasement of velocity and load ot different counterparts. The friction coefficient of TiN films at counterpart of GCr15 ball is lower than that of TiN films at counterpart of Si3N4 ball in the same condition. Tribological mechanism of TiN films at counterpart of Si3N4 ball is abrasion, while TiN films at counterpart of GCr ball which exhibites abrasion and adherences little wear.

关 键 词：配副件 TIN薄膜 摩擦学特性 

分 类 号：TQ153.4[化学工程—电化学工业] TG176[金属学及工艺—金属表面处理]