离子注入机的接受相图分析  

Acceptance diagram analysis of the ion implanter

作　　者：蔡仁康 

机构地区：[1]上海科技大学

出　　处：《核技术》1990年第12期740-748,共9页Nuclear Techniques

摘　　要：束流光学系统中各个元件的接受相图变换到同一地点,得到整个系统的接受相图。束流光学设计的任务就是使束流的发射相图与系统的接受相图相匹配。从它们的匹配情况可以估计束流的传输效率。本文以LC-2B型离子注入机为例说明了这个方法的应用。The acceptance diagrams of the components in a beam optics system are transformed to a certain point to form the acceptance diagram of the whole system. The task of beam optics calculation is to match the beam emittance diafram with the acceptance diagram of the system. The beam transportation efficiency can then be estimated. The ion implanter of LC-2B type is used as an example to illustrate the application of this technique.

关 键 词：离子 注入机 接受相图 发射相图 

分 类 号：TL503[核科学技术—核技术及应用]