激光直写技术制备SiO_2-TiO_2条形光波导工艺研究  

Direct laser writing of strip waveguide in sol-gel film

作　　者：李爱魁[1] 王泽敏[1] 刘家骏[1] 曾晓雁[1] 

机构地区：[1]华中科技大学武汉光电国家实验室,武汉430074

出　　处：《激光技术》2008年第3期317-319,共3页Laser Technology

基　　金：国家高技术发展研究计划"八六三"资助项目(2005AA311030);国家自然科学基金资助项目(5075086)

摘　　要：为了研究激光直写技术在光波导制备中的应用,采用波长为1.07μm的连续光纤激光器制备了硅基SiO2-TiO2条形光波导。探讨了激光直写技术制备条形光波导的原理,研究了激光参数对条形光波导宽度的影响,最后测试了光波导的通光模场以及光传输损耗。结果表明,条形光波导的宽度随着激光功率密度的增加而增大。当激光扫描速率在0.1mm/s^1mm/s范围内变化时,条形光波导的宽度随着激光扫描速率的增加而降低;高于1mm/s时对波导宽度无明显影响。在优化的工艺参数下,激光直写得到的条形波导的厚度约为0.4μm,宽度为120μm,整条波导非常均匀、准直性很好,对于1550nm波长的光呈多模传输,最小传输损耗为1.7dB/cm。In order to study the application of laser direct writing technology in the fabrication of strip optical waveguides, the SiO2-TiO2 strip waveguides based on silicon were manufactured using a continuous fiber laser with the wavelength of 1.07μm. The mechanism on the fabrication of strip waveguides by laser direct writing was discussed. The effect of the laser parameter on the width of waveguides was studied. Finally, the propagation mode field and optical loss at the wavelength of 1550nm were measured. The results indicate that the width of strip waveguide increases with the increase of laser power density and the decrease of laser scan velocity at the range of 0. 1mm/s - 1mm/s. There is no evident influence on the width of the strip waveguide when the laser scan velocity is higher than 1 mm/s. The strip waveguide with a height of 0.4μm and a width of 120μm was obtained by laser direct writing at the optimized parameters. The mode field in the optical waveguide is multi-mode at the wavelength of 1550 nm. The minimum propagation loss is 1.7dB/cm.

关 键 词：激光技术 条形光波导 激光直写 SIO2-TIO2 传输损耗 

分 类 号：TN252[电子电信—物理电子学]