BST铁电薄膜的水基溶胶-凝胶工艺  

Preparation of BST Film by Water-Based Sol-Gel Process

作　　者：朱时珍[1] 向飞[1] 朱满康[2] 刘颖[1] 徐强[1] 

机构地区：[1]北京理工大学材料科学与工程学院,北京100081 [2]北京工业大学材料学院薄膜材料研究室,北京100022

出　　处：《稀有金属材料与工程》2008年第A02期102-106,共5页Rare Metal Materials and Engineering

摘　　要：采用水基溶胶-凝胶工艺成功地制备了成分均匀的Ba0.7Sr0.3TiO3／Si铁电薄膜。利用光镜、SEM、TEM、XRD等手段对溶胶．凝胶和薄膜的结构、形貌进行了表征，分析了水解聚合过程和水解程度对溶胶．凝胶产物的影响，研究了工艺条件对薄膜质量的影响，讨论了热处理条件对薄膜结晶性能的影响。研究结果表明，采用较高浓度的水基前驱体，有利于薄膜的形成和均匀性。溶胶浓度0.56mol／L，pH值5．5，陈化时间48～72h，可以获得较好质量的薄膜；XRD分析表明薄膜650℃处理后已经形成了钙钛矿相的结构。BaxSr1-xTiO3（BST） film has a good foreground as an important ferroelectric film in DRAM, pyroelectric infrared detector, film-ceramic capacitor and film sensor, etc. due to strong nonlinear dielectricity, small leak current and fatigue characteristics. Ba0.7Sr0.3TiO3 ferroelectric films were prepared by water-based sol-gel process in this paper. By changing techniques condition of preparation, techniques that homogeneous and crack-less ferroelectric films were prepared with water-based sol-gel process was searched. The structure and properties of sol-gel and the films were analyzed by available testing measure such as optical microscopy （OM）, XRD, SEM and TEM. The influences of hydrolysis-polymerization process and degree of hydrolysis on production of sol-gel were investigated. The effects of process condition on properties of films were studied. The influences of heat treat condition to crystallinity were discussed. The results show that the higher concentration of water-based precursor solution is beneficial to form a uniform film. The optimum processing parameters for preparing films are as follows： concentration of precursor solution is 0.56 mol/L; pH value is 5.5; aging time is 48-72 h. Film sample with good performance can be obtained under the optimum conditions. The XRD analysis indicates that film had been perovskite after 650℃ treatment.

关 键 词：BST薄膜 sol—gel 水基前驱体 钙钛矿相 

分 类 号：O484[理学—固体物理] TN304[理学—物理]