水平轴硅微机械陀螺仪机电接口模型的电容分析  

Capacitance Analyses on Electromechanical Interface Model of Horizontal-Axis Silicon Micromachined Gyroscope

作　　者：叶甫[1] 王寿荣[1] 程龙[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《传感技术学报》2008年第3期480-482,共3页Chinese Journal of Sensors and Actuators

基　　金：国家863项目资助(2002AA812038)

摘　　要：以水平轴硅微机械陀螺仪结构为对象,建立了陀螺仪机电接口的理论模型,分析了模型中杂散电容对输出信号的影响,并用电路分析软件对模型进行仿真。结果表明,陀螺仪活动结构与衬底、引线间的电容对输出信号的影响很大,最后提出了减小杂散电容,提高信噪比的方法。The electromechanical interface model of the structure of the horizontal-axis silicon micromach- ined gyroscope is established. The impacts of the stray capacitance on output signal are analyzed and simulated with the simulation software of circuit. The results indicate that the capacitances between mass and the substrate, disposal wires have made great impact on output signal. _At last, some methods are put forward to decrease the stray capacitance and increase the signal noise ratio.

关 键 词：硅微机械陀螺仪 机电接口模型 杂散电容 仿真 

分 类 号：V241.554[航空宇航科学与技术—飞行器设计]