基于MEMS工艺的异性材料定向天线(英文)  

A Metamaterial Directional Antenna Fabricated Using MEMS Technique

作　　者：黄闯[1] 陈迪[1] 陈翔[1] 刘景全[1] 靖向萌[1] 朱军[1] 魏文婕[2] 魏泽勇[2] 李宏强[2] 

机构地区：[1]上海交通大学微米纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200030 [2]同济大学物理系,上海200092

出　　处：《传感技术学报》2008年第3期533-535,共3页Chinese Journal of Sensors and Actuators

基　　金：上海市科委重点基础研究项目资助(05JC14061);微米/纳米加工技术国家级重点实验室基金资助(9140C7903060706)

摘　　要：制备了一种基于MEMS工艺的定向天线。以异性材料为基底的亚波长谐振腔结构有效降低了天线体积。这种天线可以用于要求高能量密度的微系统的能量传送。本文中的天线厚度为1.5mm,可工作于10GHz频段。这使得其易于与微系统集成。文中也给出了仿真及实验的结果,并介绍了天线的加工过程。A directional emission antenna was fabricated using MEMS process. Its size was effectively decreased by a sub wavelength resonance cavity. Metamaterial is included as one part of the cavity. The antenna can be used in power transmission of micro system for high power density and small size. The thickness is less than 1.5 mm and work on 10 GHz. This made it easily integrated with micro system. The simulation and experimental results are carried out, and the fabricating process is also introduced.

关 键 词：天线 MEMS 谐振腔 异性材料 

分 类 号：TN603.5[电子电信—电路与系统]