梳状电极双轴微机械加速度计的研制  

The Comb Electrode Dual-Axis Micromachined Accelerometer

作　　者：陈伟平[1] 赵振刚[1] 丁金玲[1] 刘晓为[1] 马原芳[1] 

机构地区：[1]哈尔滨工业大学MEMS中心,哈尔滨150001

出　　处：《传感技术学报》2008年第4期589-592,共4页Chinese Journal of Sensors and Actuators

摘　　要：提出了一种新型的基于体硅工艺的双轴加速度传感器,量程为±50gn,采用全对称结构,其电容检测部分采用变面积、差分电容式的梳状电极结构。利用有限元分析软件分析得到本文所设计的双轴加速度传感器微结构整体质量为1.174mg,X、Y轴的灵敏度皆为2.3fF/g,模态分析结果表明,第一和第二模态振型为两敏感方向的振型,且谐振频率分别为2774Hz,2775Hz。经过MEMS加工工艺制作出的芯片尺寸为5260μm×5260μm。经过测试,此双轴加速度传感器的电学灵敏度为33.78mV/g,谐振频率为2.4KHz,带宽可达到1.5KHz。A novel bulk micromachined dual-axis accelerometer using full symmetry structure with comb finger structure is presented, of which the full-scale range is ±50 gn. The formed differential capacitance varied with areas of detecting electrodes. The static analysis indicates that the inertial mass of the dual-axis accelerometer is 1. 174 nag with the sensitivity of both the X- and Y- directions of 2. 3 fF/g.. Modal analysis result shows that the first two modes resonant frequencies are 2 774 Hz, 2 775 Hz respectively, along X and Y sensitive directions. The fabricated accelerometer structure is 5 260 μm× 5 260 μm in size. Through testing, output sensitivity is 33. 78 mV/g., resonant frequency is 2. 4 kHz,and the system bandwidth can achieve 1.5 KHz.

关 键 词：微机械电子系统 双轴加速度传感器 梳状电极 有限元分析 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]