静电吸合对力平衡式隧道加速度传感器的影响  

Influence of the Pull-in on the Force-Balanced Tunneling Accelerometers

作　　者：贺学锋[1] 温志渝[1] 温中泉[1] 王晓兰[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室

出　　处：《传感技术学报》2008年第4期596-599,共4页Chinese Journal of Sensors and Actuators

基　　金：重庆市自然科学基金项目资助(CSTC,2006BB5153);重庆市科技攻关项目资助(CSTC,2005CF2002);重庆市创新能力建设项目资助(CSTC,2004CB4003)

摘　　要：隧尖与阳极之间的可控间距是关系到隧道加速度传感器能否正常工作的一个重要参数,静电吸合限制了该可控间距的范围,本文从理论上分析了静电吸合对隧道加速度传感器设计的影响。对于质量块作活塞式运动的平动型隧道加速度传感器,只有当隧尖与阳极之间的初始间距小于两个反馈电极之间的初始间距的三分之一加上发射间距的和时,力平衡才能实现。对于质量块由多根平行悬臂梁支承的隧道加速度传感器,首次提出并证明,增大隧尖与悬臂梁末端的水平距离可以扩大锥尖高度和锥尖与阳极之间的初始间距的取值范围,从而降低对传感器加工工艺的要求。The controllable distance between the tunneling tip and the counter anode is a key parameter relative to the realization of the function of the force-balanced tunneling accelerometers. The pull-in limits this controllable distance and its influence on the design of this type of accelerometers is analyzed theoretically. For a tunneling accelerometer with a piston-motion proof mass, the force-balanced feedback technology can be realized only when the initial gap between the tunneling tip and the counter anode is smaller than one third of the initial gap between two feedback electrodes plus the emission distance. For a tunneling accelerometer with the proof mass suspended by several parallel cantilevers, we firstly proposed and proved that the applicable range of the height of the tunneling tip and the initial distance between the tunneling tip and the counter electrode can be enlarged by increasing the horizontal distance between the tunneling tip and the ends of the cantilevers.

关 键 词：加速度传感器 场致发射 力平衡 静电吸合 微机电系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]