微反射镜阵列器件技术及其应用  

Micromirror Array Technology and Its Application

作　　者：蒋剑良[1] 孙琼[1] 刘玉杰[1] 

机构地区：[1]北京理工大学信息科学技术学院光电工程系,北京100081

出　　处：《光学与光电技术》2008年第3期76-80,共5页Optics & Optoelectronic Technology

基　　金：教育部留学回国人员科研启动基金(20060132002);北京市自然科学基金(4073040)资助项目

摘　　要：概述了微反射镜阵列器件的分类、其主要驱动方式,以及现有商用阵列器件的情况。就4种驱动方式,介绍了其机电特性和工艺特点,并进行比较分析,指出选择驱动方式应依据应用的性质、工艺集成难度和成本效益原则。总结了微反射镜阵列器件在5个方向的应用。最后,阐述了微反射镜阵列器件技术展望。The category of micromirror array, main actuation mechanisms, and the commercialized devices are set forth in this paper. As for the four actuations, the electro-mechanical characteristics and process techniques are presented and compared. It is indicated that the character of application, the difficulty of process, and cost-effectiveness will play an important role on the selection of actuation mechanism. Five application areas of micromirror array are summarized as well. At last, a prospect is given.

关 键 词：微反射镜阵列 微执行器 应用 

分 类 号：TH703.8[机械工程—仪器科学与技术]