CVD金刚石厚膜刀具刃口半径研磨的实验研究  

Experimental study on edge radius lapping of thick CVD diamond filmed cutting tools

作　　者：王加春[1] 刘志平[1] 杨育林[1] 郭辉[2] 

机构地区：[1]燕山大学机械工程学院,秦皇岛066004 [2]河北省科学院激光研究所,石家庄050081

出　　处：《金刚石与磨料磨具工程》2008年第3期31-34,共4页Diamond & Abrasives Engineering

基　　金：河北省自然科学基金项目(E2006000221)

摘　　要：CVD金刚石膜具有与单晶金刚石相近的力学性能,是一种理想的高精度刀具材料。研磨是制作CVD金刚石厚膜高精度刀具的关键环节之一。本文针对与刀具刃口半径紧密相关的研磨工艺进行了一些研究工作。实验结果表明：研磨盘端面跳动控制在10μm以内,动态不平衡度控制在0.3 g.mm/kg以内,选择1μm以下的研磨粉粒度,研磨速度控制在20-30 m/s范围,金刚石厚膜刀具刃口半径可达80 nm,圆弧轮廓精度可以控制在0.5μm左右;车削加工LY12外圆和端面,表面粗糙度可达Ra0.02μm,达到镜面效果,可以替代同等精度的单晶金刚石刀具。CVD diamond is an ideal material for high-precision cutting tools with mechanical properties similar to single crystal diamond. In this paper the lapping technique of high-precision CVD diamond cutting tools about edge radius was investigated. Experimental result showed that edge radius of 80 nm and arc precision 0.53 μm can be obtained with the grain size of lapping powder under 1 μm, and with the optimal parameters such as the run out of lapping plate less than 10 μm, the dynamic balance of lapping plate less than 0.3 g. mm/kg, and the lapping velocity within 20 - 30 m/s. The surface of the work piece LY12 turned by such a CVD diamond-cutting tool is specular with roughness Ra 0.02 μm. This kind of CVD diamond cutting tools can be an ideal alternative to single crystal diamond cutting tools with the same precision.

关 键 词：CVD金刚石膜 刀具 研磨 刃口半径 刃口轮廓精度 

分 类 号：TQ164[化学工程—高温制品工业]