硅镜超声加工声学系统设计  

Design of an acoustics system for ultrasonic machining of Sic mirror

作　　者：张云电[1] 余芳[1] 

机构地区：[1]杭州电子科技大学机械工程学院,浙江杭州310018

出　　处：《机电工程》2008年第6期24-26,共3页Journal of Mechanical & Electrical Engineering

基　　金：浙江省自然科学重点基金资助项目(Z105528)

摘　　要：近年来,超声加工方法已经越来越多地应用于脆硬材料的加工,超声声学系统是功率超声设备的核心和关键所在,其设计的好坏直接影响到其应用的效果。在分析超声声学系统工作原理的基础上,给出了该声学系统的具体设计方案,并且专门针对硅镜超声加工声学系统进行了设计及实验。实验结果表明,所设计的声学系统性能比较稳定,换能器发热较少,效率较高。Ultrasonic machining is used widely in machining hard and brittle materials, the acoustic system is the key part of the power ultrasonic equipment, the quality of design influence application effect directly, The design method of the acoustic system was presented based on analyzing the working principle of acoustics system, and acoustics system for ultrasonic machining of Sic mirror was designed. The experimental results indicate that the designed acoustics system has stable performance and high efficiency.

关 键 词：硅镜 脆硬材料 超声加工 声学系统 

分 类 号：TG663[金属学及工艺—金属切削加工及机床]