硅微矢量水声传感器的封装及测试方法研究  

The encapsulation and testing of a vector hydrophone based on silicon

作　　者：陈尚[1] 薛晨阳[1] 张斌珍[1] 张国军[1] 乔慧[1] 张开锐[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《哈尔滨工程大学学报》2008年第5期493-498,共6页Journal of Harbin Engineering University

基　　金：国家自然科学基金资助项目(50405025;50535030)

摘　　要：针对目前矢量水声传感器存在的高灵敏度、低频检测以及小型化等问题,提出了一种新型的硅微MEMS矢量水声传感器.利用敏感材料的压阻效应?传感器精巧的微结构以及硅微MEMS技术,实现矢量水声传感器的低频特性和小型化的可行性.以声场中的刚硬圆柱在声波作用下的声散射问题作为切入点,对传感器的同振原理进行分析,并基于该机理以及传感器的特殊结构,提出采用注入蓖麻油的方法实现微结构的柱体与所处介质质点同振.分别采用振动台标定和驻波场测量的方法完成了传感器的灵敏度、频响以及指向性的测试,最后对2种测试结果进行了分析和比较.研究结果表明:所研制的水声传感器具有较低的工作频率,其水下自由场声压灵敏度值为-207.6 dB(0 dB=1 V/μPa,测试频率为200 Hz),指向性图的零点深度为50.9 dB.We propose a micro electro mechanical systems （MEMS） vector hydrophone based on silicon to solve problems facing vector hydrophones, such as high sensitivity, low-frequency detection, minimization, etc. The feasibility of implementing its low frequency feature and minimization was studied using the piezoresistive effect, MEMS technology, and an ingenious structure for the hydrophone. Firstly, we analyzed scattering theory for a rigid column, and then the working principles of resonant-column type vector hydrophones. On that basis, we injected castor oil into a hat made of polyurethane rubber in order to improve resonance of the rigid column with particles of the acoustic medium. Secondly, the properties of this and standard vector hydrophones, such as sensitivity, frequency response and directivity, were measured with the vibration-platform calibration and standing wave field measurement methods, respectively. Final- ly, the results were analyzed and compared. The experimental results showed that the proposed vector hydrophone has good low-frequency performance, its free-field sound sensitivity is -207.6dB （ 0 dB= 1 V/μPa, testing frequency 200 Hz）, and the zero depth of the directivity pattern is 50. 9 dB.

关 键 词：硅微矢量水声传感器 低频测试 同振型 MEMS 

分 类 号：TB565.1[交通运输工程—水声工程]