有机-无机复合材料光波导的制备  

Fabrication of organic-inorganic composite optical waveguides

作　　者：王哲哲[1] 赵高扬[1] 李美莲[1] 盛淑月[1] 张晓磊[1] 

机构地区：[1]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《功能材料》2008年第6期892-895,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(90401009);西安应用材料创新基金资助项目(XA-AM-200611)

摘　　要：有机-无机复合光波导在光通信领域具有重要的应用价值,是目前的研究热点之一。采用溶胶-凝胶法分别制备了膜厚达13μm的光滑平整的PMMA膜和具有紫外感光性的膜厚为1.76μm的SiO2/ZrO2凝胶膜,研究了SiO2/ZrO2凝胶膜的感光性及紫外光照对两种薄膜折射率的影响。在此基础上,以PMMA膜为包层膜,SiO2/ZrO2凝胶膜为芯层膜,实现了光波导的包芯层复合。利用SiO2/ZrO2凝胶膜的感光性,结合紫外掩模技术,制备了条形的有机-无机复合光波导,理论分析表明该复合条形光波导能够实现入射波长为1.31μm,模数为0,1的传输。Organic-inorganic composite optical waveguide plays an important role in optical communication field. In this paper, single glossy PMMA layer with the thickness of 13μm and UV photosensitive SiO2/ZrO2 gel layer with 1.76μm have been successfully fabricated by sol-gel method respectively. The photosensitivity of SiO2/ ZrO2 gel layer and effect of UV irradiation on refractive index of both layers have been studied. On this basic, the composite optical waveguide layer has been obtained by using PMMA film as a cladding layer and SiO2/ZrO2 gel layer as a core layer. Furthermore, the strip composite waveguide has been successfully fabricated by using UV photo-mask method on the photosensitive SiO2/ZrO2 gel layer. The strip organic-inorganic waveguide can be applied to transmitting optical waveguide with 1.31μm incidence wavelength in zero or one modulus indicated by the optical waveguides theory.

关 键 词：复合光波导 PMMA膜 SiO2/ZrO2凝胶膜 折射率 

分 类 号：TB43[一般工业技术] TN252[电子电信—物理电子学]