金属诱导多晶硅电极用于液晶显示透反功能的设计  

Transflective Function of LCDs Using MIC Poly-Si Pixel Electrodes

作　　者：李阳[1] 孟志国[1] 吴春亚[1] 熊绍珍[1] 

机构地区：[1]南开大学光电子研究所,天津市光电子薄膜器件与技术重点实验室,天津300071

出　　处：《Journal of Semiconductors》2008年第6期1172-1176,共5页半导体学报（英文版）

基　　金：国家高技术研究发展计划(批准号:2004AA303570);国家自然科学基金重点基金(批准号:60437030)资助项目~~

摘　　要：溶液法金属诱导晶化(S-MIC)的p型掺杂多晶硅薄膜,具有较好的电学特性和近似半透半反的光学特性,可作为透、反两用功能液晶显示器件(LCD)的像素电极材料.但MIC多晶硅薄膜的透射与反射在红、绿和蓝三色区存在着一定的差异,势必导致合成白光的"畸变".为此,作者在MIC(大晶畴)多晶硅材料制成的电极上,在制备并光刻TFT源、漏电极铝金属引线的同时,光刻出不同面积的铝反射片来平衡和补偿经过MIC多晶硅薄膜透过与反射的红、绿、蓝三基色光,有效地进行红、绿、蓝三基色出光光谱的校正.校正结果表明在可见光范围内,其红光、绿光和蓝光处的透射率和反射率基本符合白光平衡的要求;由此形成了具有透、反两用功能的LCD多晶硅像素电极技术.Boron-doped solution-based metal induced crystallized poly-Si thin film has good electrical characteristics and optical characteristics with semi-transparent and semi-reflective functions. It can be used as an LCD electrode that is both transparent and reflective. However, the transmission and reflection character of the MIC poly-Si thin film is different among the red, green, and blue （R, G, B） color regions,resulting in the ＂aberrance＂ of the composing white light. Accordingly, high reflectivity Al with different area was etched and adopted to compensate and balance the three essential color light permeating and reflecting from the MIC p-Si electrode when TFT source and drain metal Al electrodes were being prepared. The experimental results indicate that in the range of visible light, the reflectivity and transmissivity of red,green, and blue light basically meet the requirement of white light balance. Consequently,using this technique,an LCD panel that has both transparent and reflective functions has been obtained.

关 键 词：LCD 多晶硅薄膜电极 光谱校正 

分 类 号：TN141.9[电子电信—物理电子学]