射频磁控溅射法制备FC/ZnO杂化材料及其基本性质  

Hybrid FC/ZnO materials prepared by RF sputtering and their basic properties

作　　者：张浴晖[1] 齐宏进[2] 

机构地区：[1]青岛大学化学化工学院 [2]五邑大学纺织服装系,广东江门529020

出　　处：《化工学报》2008年第6期1584-1589,共6页CIESC Journal

基　　金：青岛大学青年科研基金项目~~

摘　　要：采用射频磁控溅射法,首先以聚四氟乙烯(PTFE)为靶,氩气为载气,在聚对苯二甲酸乙二醇酯(PET)基底上沉积氟碳(FC)膜;然后以金属锌为靶,氩气为载气,氧气为反应气体,在FC膜上再沉积一层ZnO膜而形成FC/ZnO有机-无机纳米杂化材料。用AFM、XPS、UV以及静态接触角测定仪对杂化材料的基本性质进行了研究。结果表明,该法制得的杂化材料是由纳米粒子组成的岛状结构,岛的表面起伏不平。其生长模式是一种依附于有机核的沉积-扩张生长。杂化材料具有较好的紫外吸收特性,这是由于其分子结构中含有π-π共轭双键、表面的不平整性以及纳米氧化锌粒子对紫外光的吸收共同作用的结果。静态水接触角均大于90°,呈现出良好的疏水性。In this paper, FC/ZnO hybrid materials were prepared by radio frequency（RF）sputtering.At the first step, fluorocarbon films were deposited by RF sputtering polytetrafluoroethylene （PTFE） target on polyethylene terephthalate （PET） substrate.Argon was used as the working gas.And then, zinc oxide （ZnO） films were deposited by RF sputtering zinc target on fluorocarbon films.Argon was also used as the working gas and oxygen was used as the reacting gas.So hybrid FC/ZnO materials were obtained.Hybrid FC/ZnO materials were characterized by means of AFM, XPS,UV and static contact angle.It was found that the obtained hybrid films were islands-structure composed of nanometer particles.The surface of islands was not flat.The growth mode of composite films was deposition and expansion.The hybrid films exhibited intense ultraviolet absorption due to π-π-conjugated double bonds, surface roughness and absorption of ultraviolet light by ZnO particles.The contact angle of the hybrid films was larger than 90°, exhibiting excellent water-repellent properties.

关 键 词：磁控溅射法 杂化材料 表面形貌 紫外吸收 表面结构 接触角 

分 类 号：O484.1[理学—固体物理]