基于隧道效应的振动检测反馈系统设计  

Design of Nano-vibration Detection Feedback Control System Based on Tunelling Effect

作　　者：陈帆[1] 傅星[1] 李梦超[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《河南科技大学学报（自然科学版）》2008年第4期77-81,共5页Journal of Henan University of Science And Technology:Natural Science

基　　金：国家自然科学基金资助项目(60372006)

摘　　要：针对扫描隧道效应对环境的苛刻要求,旨在设计一种主动隔振系统提高STM工作的稳定性,主要基于隧道效应的原理搭建闭环控制系统,主动适时的响应和补偿振动的干扰。硬件部分包括以DSP为核心的高速精确的测控电路,软件部分解决了数字滤波和PI控制算法在提高控制性能上的关键问题。并利用仿真现象和实验结果进行控制特性和动态响应的分析,证明其良好的实时控制效果。The STM is a high precision instrument sensitive to disturbances originating from sound waves,vibrations and temperature variations.All these factors affect the STM operational reliability.As practical experience indicates,STM can not work well in the open loop control system.In this paper,attention is focused on improving the STMs control system.The design of the hardware circuit which depends on DSP is introduced,and the signal processing and PI control arithmetic are also mentioned.Finally,the emulation and experiment results have proved the good quality of control system.

关 键 词：隧道效应 反馈控制电路 PI控制算法 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]