光栅平动式光调制器机械特性分析与仿真  

Analysis and simulation for mechanical characteristics of grating movable light modulator

作　　者：韩磊[1] 黄尚廉[1] 张洁[1] 贺学峰[1] 伍艺[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400030

出　　处：《仪器仪表学报》2008年第6期1129-1133,共5页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(60708017);重庆市院士基金(8883);重庆市自然科学基金(CSTC;2007BB2110)资助项目

摘　　要：光栅平动式光调制器是基于MOEMS技术的新型光调制器,利用静电力驱动可动光栅对入射光进行调制,因其具有高速开关特性与面阵化等特点使其在显示与打印方面有广阔的应用前景。但是其结构相对复杂,本文通过建立光栅平动式光调制器的机电模型,并依据力学理论及虚功原理对器件的机械特性进行了相应的分析,得出器件的载荷挠度特性。并利用Coven-torWare软件进行相应的有限元仿真分析。仿真表明,在工作距离范围内,理论数据与仿真数据具有很好的拟合度,其平均误差在5%左右。GMLM （grating movable light modulator） is a novel light modulator based on MOEMS technology. Incident light is modulated by a movable grating, which is operated by electrostatic force. Due to its fast switching speed and characteristic of two-dimensional array, it can be used in the fields of display and printing. The electrical and mechanical model of GMLM was established, then mechanical characteristics of GMLM were analyzed by applying mechanics theory and principle of virtual work, and the approximate solution of load-deflection characteristic was gained. Mechanical characteristics of GMLM were also simulated by FEM （ finite element method） software-CoventorWare. Simulations show that the theoretical analysis data and the simulation results are highly coincident in the range of deflection that the device needs, the average error is below 5%.

关 键 词：微机电系统 光调制器 挠度方程 机械特性 有限元仿真 

分 类 号：TH741.5[机械工程—光学工程] TH703.8[机械工程—仪器科学与技术]